Wet scrubbers – which separate particles, fluids, or gaseous materials from exhaust air flow – were first used 160 years ago. Historical records support the fact that water was already being used as a natural bonding agent for dust more than 2000 years ago. Today, it is primarily legal regulations, such as the German Pollution Protection Act (BlmSchG) or the German Technical Regulations on Emissions (TA Luft), that support using different types of air scrubbers in a wide variety of industrial sectors. Currently, industrial use already requires the reduction of particles as small as 1 micron, i.e., 0.001 mm. Today, the toughest demands in industry have been documented for semiconductor manufacturing.